IMEC and SUSS MicroTec to Collaborate on Wafer Bonding for 3D Integration Applications

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SUSS MicroTec, a leading supplier of process and test solutions for the semiconductor and related industries, and the Belgian nanoelectronics research center IMEC have entered a joint development program. Together, they will develop permanent bonding, temporary bonding and debonding processes for 3D system integration, including through-silicon-via (TSV) manufacturing.

IMEC will use SUSS MicroTec’s XBC300 production wafer bonder platform to develop 200 and 300mm permanent metallic interconnect bonding, as well as temporary bonding and debonding solutions for its 3D-stacked Interconnect and 3D Wafer Level Packaging technology. This universal platform can support a wide range of materials and processes, and allows debonding dies at room temperature, which is an important condition for the integration of memory ICs and CMOS image sensors. The bond cluster also includes a spin coater, a low force bonder and a plasma chamber.

For its 3D IC technology, IMEC uses a process flow where TSVs are realized in a single-damascene process that is performed immediately after front-end and contact processing but prior to processing of the back-end metallization layers. This process enables small via diameters of 1–5µm. After completion of the back-end wiring, silicon is removed from the bottom of the substrate to open the buried TSVs. Dies or wafers subsequently are stacked and interconnected in a wafer bonding step.

“We are very pleased to co-develop with SUSS MicroTec the processes for permanent and temporary wafer bonding for our 3D technologies,” said Eric Beyne, Program Director of IMEC’s Advanced Packaging and Interconnect Research Centre. “In particular, the debonding and handling of very thin wafers ranging from 25 to 50µm is an especially challenging and critical process. We are convinced that the versatility of the SUSS wafer bonding and debonding tool platform will contribute to bringing 3D integration technology to maturity.”

“Working with IMEC, a premier research facility, on 300mm 3D development for temporary and permanent bonding applications is an exciting opportunity for SUSS MicroTec,“ said Wilfried Bair, General Manager, SUSS MicroTec’s Bonder Division. “This cooperation is clearly in the path of our strategic engagement with leading industry partners at the fore-front of development. The co-development combined with our focus on understanding our customers’ needs will help us to continuously provide state-of-the-art technology and solutions to our customers today and tomorrow.”

Lil Guppie—A Modern Swiss Knife

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This swiss knife has an adjustable wrench that can be opened up to 10 mm which is good for repairing small parts. The knife is made up of high carbon steel which has a razor sharp edge. Other features of this swiss knife are listed below:

Designed and manufactured by Columbia River Knife & Tool
Compact, easy to carry tool
Steel blade, adjustable wrench, carabiner, flat screwdriver, Phillips screwdriver, pocket/money clip, bottle opener
Bead blast finish
Blade length: 1″ (2.54 cm)
Handle length: 3″ (7.6 cm)
Tool weight: 1.9 oz (54 g)

World Digital Library Launches Online

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The Library of Congress and others have launched the World Digital Library, it puts online cultural materials from 32 different countries.  The World Digital Library is an ambitious project which aims to put primary reading materials coming from different countries into the internet. It also aims to provide these reading materials free of charge and in multilingual format.

It is run by the Library of Congress with the support of other partners in different countries and the United Nations Education, Scientific, and Cultural Organization.

http://www.wdl.org/en/

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